Products Description
Titanium planar sputtering target material is a metallic target used in Physical Vapor Deposition (PVD) technology. Manufactured from high-purity titanium metal (or titanium alloys) into flat plate or disc shapes, it is designed for DC or RF sputtering applications. Its core value lies in providing high melting point, low density, excellent mechanical strength, and good chemical inertness. The deposited titanium films exhibit high hardness, corrosion resistance, and strong adhesion, serving advanced applications in semiconductors, displays, photovoltaics, optical storage, and biomedical fields.
Titanium Plate Target Specifications
|
Normal Size |
Material |
Composition |
|
12×132×1701 mm |
Ti Gr1 |
99.70% |
|
13×132×1701 mm |
Ti Gr2 |
99.50% |
|
12×170×830 mm |
Ti 4N |
99.99% |
|
8×133×410 mm |
Zr702 |
Zr+Hf>99.2% |
|
8×158×1108 mm |
Ta1 |
99.95% |
|
10×159×1519 mm |
Nb1 |
99.95% |
|
18×152×635 mm |
2N Cr |
99.50% |
|
20×190×740 mm |
3N Cr |
99.90% |
Applications
Semiconductors & Microelectronics: Barrier layers, interconnect layers, and low-resistance conductive layers for integrated circuits, requiring ultra-high purity ≥99.995% for ≤0.18 µm linewidth processes
Flat Panel Displays (LCD/OLED): Titanium thin films deposited on glass substrates as electrodes or barrier layers, enhancing display durability and optical performance
Photovoltaics (Thin-film Solar Cells): Back electrodes or anti-reflection layers to improve photoelectric conversion efficiency
Optical Storage & Communication: Hard protective layers or conductive layers for CD-ROMs, optical discs, and fiber optic couplers
Surface Hardening & Wear-resistant Coatings: Ti/TiN composite layers on tools and molds to significantly enhance hardness and corrosion resistance
Biomedical: Surface modification of implantable devices utilizing titanium's excellent biocompatibility to improve osseointegration
Product Advantages
|
Advantage |
Key Benefits |
|
High Purity, Low Impurities |
Purity ≥99.99% effectively suppresses oxygen/nitrogen incorporation, ensuring optimal electrical/optical properties |
|
High Density & Uniformity |
Vacuum melting and thermomechanical processing achieve >99.5% density, minimizing discharge irregularities from porosity |
|
Excellent Mechanical Strength |
Bending strength ≥300 MPa (at wall thickness ≥5 mm) withstands centrifugal forces in high-speed rotation and high-power sputtering |
|
Good Thermal Conductivity & Dissipation |
Thermal conductivity 21.9 W·m⁻¹·K⁻¹ enables 10-15 kW high-power deposition with water-cooled backing plates |
|
Corrosion & High-Temperature Resistance |
High melting point (1668°C) and titanium's passive oxide layer ensure long-term stability in argon/nitrogen atmospheres |
|
Processing Flexibility |
Available in planar, circular, stepped, and custom shapes with wide size ranges for various equipment (magnetron sputtering, laser sputtering, ion beam deposition) |
|
Standardized Testing |
International analytical methods (GDMS, LECO) ensure compliance with YS/T 893-2013 and GB/T 4698 standards, guaranteeing product traceability |
Chemical Properties
Main Composition: Pure titanium (Ti) with metallic impurities (Fe, Cr, Ni, etc.) ≤10 ppm and gas impurities (O, N, C, H) ≤200 ppm, ≤100 ppm, ≤50 ppm, ≤30 ppm respectively (per YS/T 892/891 standards)
Oxidation Behavior: Forms dense TiO₂ passivation layer at room temperature, providing excellent corrosion resistance; maintains good stability at high temperatures (>600°C)
Substrate Compatibility: Excellent adhesion to Si, SiO₂, Al₂O₃, GaAs, and glass substrates; interface bonding strength can be enhanced through preheating or surface cleaning
Mechanical Properties
|
Parameter |
Typical Value |
Remarks |
|
Density |
4.54 g·cm⁻³ |
Consistent with theoretical value |
|
Hardness |
HV ≈200-250 (heat treatment dependent) |
High hardness contributes to wear resistance |
|
Bending Strength |
≥300 MPa (wall thickness ≥5 mm) |
Suitable for high-speed rotating targets |
|
Elastic Modulus |
≈110 GPa |
Provides good mechanical rigidity |
|
Thermal Expansion Coefficient |
8.6 × 10⁻⁶ K⁻¹ (20-100°C) |
Good compatibility with common substrates |
Selection & Usage Guidelines
Purity Requirements: Standard functional films (decorative, general protection): 99.9%-99.99%; High-end semiconductors/photovoltaics: ≥99.995% ultra-high purity to minimize oxygen/nitrogen impact on electrical properties
Power & Heat Dissipation: High-power (>10 kW) sputtering recommends planar targets with thickness ≥5 mm and thermal conductivity ≥21 W·m⁻¹·K⁻¹, combined with water-cooled backing plates to prevent localized overheating
Dimensions & Shapes: Circular or stepped targets for rotating cathodes; rectangular plate targets for large-area deposition (e.g., roll-to-glass coating), customized to equipment stage dimensions
Surface Treatment: Ultrasonic cleaning and vacuum packaging ensure oil-free, particle-free surfaces; pre-installation inspection and light polishing recommended to reduce roughness if necessary
FAQ:
Do you provide samples?
A: Yes, we offer complimentary samples with shipping arranged by the customer. We recommend testing samples or placing trial orders before larger purchases.
Q: How competitive are your prices?
A: Our pricing reflects exceptional value when considering the premium quality and comprehensive service we provide.
Q: What is your quotation turnaround time?
A: Typically 24 hours after inquiry receipt. Urgent requests receive priority handling upon notification.
Q: How do I request custom products?
A: Please share your drawings, images, or samples. We will confirm specifications and promptly initiate production.
Contact:
About STRX Titanium – Why Choose Us?
Premium Materials：We select premium raw materials to ensure quality control from the source.
Rigorous Quality Inspection：Strict quality inspection standards are implemented to ensure 100% compliance with customer requirements.
Customized Solutions：We understand that each industry has unique needs. Our team works closely with clients to tailor products based on specific requirements. We customize all titanium products (color/size, etc.) according to customer drawings or ideas.
Fast Delivery：Advanced production management ensures efficient and prompt delivery from production to shipment.
Expert Support：Gain insights from our dedicated expert team, who provide professional advice and practical assistance. STRX Titanium helps you identify and select the best solutions tailored to your business needs, ensuring optimal results and satisfaction.
STRX Titanium has earned consistent praise from clients for high-quality products and competitive pricing. With strict quality control and professional technical support, we look forward to cooperating with you!
In Summary,STRX Titanium is a leading manufacturer and supplier of titanium products in China. We maintain strong technical partnerships with major domestic and international equipment manufacturers and uphold rigorous quality standards to meet client demands.
If you are looking for a reliable titanium product supplier, please contact us immediately to learn more about our products and services.
Email: info@strx-titanium.com
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