Detailed Description
Titanium rotating sputtering target material is a hollow cylindrical target specifically engineered for vacuum magnetron sputtering (PVD) processes. Manufactured from high-purity titanium (99.9%-99.999%) through precision machining, heat treatment, and surface grinding, it enables 360° uniform erosion during high-speed rotation (200-500 rpm).
Titanium Tubular Target Specifications
|
Normal Size |
Material |
Composition |
|
Dia141×125×1550mm |
Ti Gr1 |
99.70% |
|
Dia152×125×966mm |
Ti Gr2 |
99.50% |
|
Dia152×125×1566mm |
Ti 4N |
99.99% |
|
Dia70×56×1560mm |
Zr702 |
Zr+Hf>99.2% |
|
Dia70×56×2100mm |
Ta1 |
99.95% |
|
Various |
Nb1 |
99.95% |
|
Various |
2N Cr |
99.50% |
|
Various |
3N Cr |
99.90% |
Applications
Semiconductors & Microelectronics: Metal interconnect layers, barrier layers, and pre-titanium layers for high-k dielectrics
Display Technology: Source/drain electrodes or optical modulation layers in TFT displays, achieving >80% material utilization
Optical & Functional Glass: TiO₂ anti-reflection (AR) coatings, low-emissivity (Low-E) glass
Aerospace & Defense: Hard, corrosion-resistant protective coatings, thermal barriers, sensor encapsulation
Biomedical: Biocompatible films for implant surfaces, offering excellent bio-inertness and corrosion resistance
Product Advantages
|
Advantage |
Key Benefits |
|
High Material Utilization |
80%-90% utilization rate vs. 40%-60% for planar targets |
|
Superior Film Uniformity |
≤±3% thickness deviation at >10kW power (±8% for planar targets) |
|
Enhanced Heat Dissipation |
50% increased water-cooling contact area supports 10-15kW high-power sputtering |
|
Reliable Mechanical Strength |
≥300MPa bending strength at ≥5mm wall thickness withstands centrifugal forces |
|
High Surface Cleanliness |
SR grinding reduces surface particles (30→10), improves deposition stability |
|
Multi-Power Density Compatibility |
Uniform thermal distribution maintains target surface temperature balance |
Usage Recommendations
Cooling Method: Water-cooled sleeves or spray cooling recommended for optimal heat dissipation
Power Settings: Direct use below 10kW; thermal simulation recommended for >15kW applications
Surface Treatment: SR-ground targets preferred for high-precision films to reduce particle contamination
Lifecycle Management: Regular erosion monitoring; utilization rates support >200 hours between replacements (power density dependent)
FAQ:
A: Yes, we offer complimentary samples with shipping arranged by the customer. We recommend sample testing or trial orders before larger purchases.
Q: How competitive are your prices?
A: Our pricing reflects exceptional value when considering the premium quality and comprehensive service we provide.
Q: What is your quotation turnaround time?
A: Typically 24 hours after inquiry receipt. Urgent requests receive priority handling upon notification.
Q: How do I request custom products?
A: Please share your drawings, images, or samples. We will confirm specifications and promptly initiate production.
About STRX Titanium – Why Choose Us?
Premium Materials：We select premium raw materials to ensure quality control from the source.
Rigorous Quality Inspection：Strict quality inspection standards are implemented to ensure 100% compliance with customer requirements.
Customized Solutions：We understand that each industry has unique needs. Our team works closely with clients to tailor products based on specific requirements. We customize all titanium products (color/size, etc.) according to customer drawings or ideas.
Fast Delivery：Advanced production management ensures efficient and prompt delivery from production to shipment.
Expert Support：Gain insights from our dedicated expert team, who provide professional advice and practical assistance. STRX Titanium helps you identify and select the best solutions tailored to your business needs, ensuring optimal results and satisfaction.
STRX Titanium has earned consistent praise from clients for high-quality products and competitive pricing. With strict quality control and professional technical support, we look forward to cooperating with you!
In Summary,STRX Titanium is a leading manufacturer and supplier of titanium products in China. We maintain strong technical partnerships with major domestic and international equipment manufacturers and uphold rigorous quality standards to meet client demands.
If you are looking for a reliable titanium product supplier, please contact us immediately to learn more about our products and services.
Email: info@strx-titanium.com
Hot Tags: titanium rotating sputtering target material, China titanium rotating sputtering target material manufacturers, suppliers, factory, custom sputtering targets
